Silicon Carbide Wafer Boat
High-purity SiC wafer boats engineered for diffusion, oxidation and LPCVD batch processing. Options include RSiC, SSiC and CVD-SiC to match temperature, purity and cost targets. Typical 25-slot capacities with precision slot pitch for uniform thermal processing.
- Samples in 3–7 days
- Small batch in ~7 days
- 1 pc MOQ
SIC Wafer Boats Overview
Zirsec’s silicon carbide wafer boats are engineered for high-temperature semiconductor applications including LPCVD, oxidation, diffusion, and epitaxy. With outstanding thermal stability, chemical resistance, and precision groove design, our SiC wafer boats ensure excellent wafer support, low particle contamination, and high process yield. Available in vertical, horizontal, round, and custom configurations, they support wafer sizes from 2″ to 8″. Zirsec also offers full OEM design services to meet your specific furnace or process needs.
Sic Vertical Wafer Boat
Designed to hold wafers in a vertical orientation, ideal for vertical furnace systems. Offers excellent thermal uniformity and minimal wafer warpage.
SiC Horizontal Wafer Boat
Supports wafers horizontally, commonly used in horizontal furnace systems. Provides even spacing and precise wafer alignment for thermal processing.
SiC Horizontals Square Wafer Boat
Square-type horizontal wafer holder with high mechanical strength. Suitable for large-size wafers and batch operations under harsh thermal cycles.
SiC LPCVD Wafer Boat
Specially engineered for LPCVD processes requiring high purity and thermal stability. Minimizes contamination in semiconductor film deposition applications.
Silicon Carbide Horizontal Boat Plate
A flat plate structure for supporting multiple wafers horizontally. Offers excellent thermal conductivity and structural rigidity at high temperatures.
SiC Round Wafer Boat
Round-style wafer boat offering stable support and airflow for circular furnaces. Ideal for applications requiring symmetric heating and low particle generation.
FEATURES & BENEFITS
- Wide pH resistance (0–14) – Chemically inert
- High thermal stability (up to 800°C)
- Hydrophilic surface – Enhances water permeability
- Isoelectric point: pH 2.4
- Extreme hardness: 2930 ±80 kgf/mm² (Vickers)
- Handles abrasive feeds – Resists wear
- Energy-efficient – Low pressure & power use
- Long lifespan – Reduced replacement costs
- Low operational & ownership costs
APPLICATIONS AREAS
- Marine scrubber wash water treatment
- Produced water management
- Pre-treatment for potable water
- Filtration for reverse osmosis systems
- Separation of oil emulsions
- Removal of bacteria in aquaculture
- Handles abrasive feeds – Resists wear
- Industrial wastewater treatment
- Metal separation from industrial liquids
RBSiC Product Technical Data
| Item | Unit | RBSiC (SiSiC) Value |
| Application Temperature | ℃ | 1380 |
| Density | g/cm³ | ≥3.02 |
| Open Porosity | % | ≤0.1 |
| Bending Strength (20℃) | MPa | 250 |
| Bending Strength (1200℃) | MPa | 280 |
| Modulus of Elasticity (20℃) | GPa | 330 |
| Modulus of Elasticity (1200℃) | GPa | 300 |
| Thermal Conductivity (1200℃) | W/(m·K) | 45 |
| Coefficient of Thermal Expansion | ×10⁻⁶ K⁻¹ | 4.5 |
| Mohs Hardness | – | 9 |
| Acid & Alkali Resistance | – | Excellent |
Technical Parameters of SSIC
| Item | Unit | SSiC Value |
| Application Temperature | ℃ | 1600 |
| Hardness (Hv1) | HRA | ≥92 |
| Compressive Strength | MPa | ≥2600 |
| Bending Strength | MPa | ≥400 |
| SiC Content | % | ≥99 |
| Modulus of Elasticity | MPa | 410 |
| Thermal Conductivity | W/(m·K) | 100–120 |
| Coefficient of Thermal Expansion | 1/℃ | 4 |
| Open Porosity | % | ＜0.1 |
| Poisson’s Ratio | – | 0.16 |
Custom SIC Wafer Boats Solutions
Zirsec offers high-quality custom silicon carbide (SiC) wafer boats designed for superior thermal stability and chemical resistance in semiconductor processing. Made from advanced SiC materials, our wafer boats ensure precise fit, durability, and contamination-free handling to optimize your production performance.
Customization Requirements
Material Selection
Choose based on temperature and corrosion resistance..
Dimensions & Shape
Custom fit for equipment and wafer size.
Surface Finish
Improve smoothness to reduce contamination.
Load Capacity
Support required wafer quantity and weight.
FAQ
1) RSiC vs SSiC vs CVD-SiC — how to choose?
2) What slot pitch should I specify?
3) How many wafers per boat?
4) Can you support back-to-back (half-pitch) PV diffusion?
5) Temperature limits compared with quartz?
6) Do you offer graphite boats with CVD-SiC coating?
7) Which processes are supported?
8) Can you match our automation?
9) What information should I provide for a quote?
10) Lead time and MOQ?
11) Do you offer ultra-clean grades?
Yes. CVD-SiC boats at ≈99.999% purity are offered for ultra-clean LPCVD/oxidation lines.
Customization
From design to reverse engineering, we provide free technical consulting to help upgrade your equipment. We specialize in high-precision complex parts with ±0.01mm tolerances and special coatings like acid and oxidation resistance, tailored for demanding industrial applications.
FAQ
What types of silicon carbide products does Zirsec supply?
Zirsec offers a wide range of SiC components including tubes, beams, plates, crucibles, rollers, sealing rings, and custom mechanical parts for industrial, chemical, and semiconductor applications.
Can Zirsec provide customized sizes or shapes?
Yes. We support OEM and customized production based on your drawings, specifications, or working conditions.
Do you provide samples for testing?
Yes, sample orders are available for standard items. For custom-made components, small batch samples can be produced after design confirmation.
How can I request a quotation?
Simply fill out the contact form on this page with product type, quantity, and specifications. Our sales engineer will send you a detailed quotation within 24 hours.
Does Zirsec offer technical consultation or design assistance?
Absolutely. Our engineers provide material selection guidance, structural optimization, and technical support for your specific applications.
How does Zirsec ensure product quality?
All products undergo strict inspection procedures, including dimensional accuracy, density, strength, and corrosion resistance tests before delivery.
Tell us your requirements
Our technical engineer will reply with a custom solution and quotation within one working day.
